Xinghui Li

Associate Professor
Email : li.xinghui@sz.tsinghua.edu.cn
Phone : 0755-26032544
Office Location : Room 813, Energy Building of Tsinghua SIGS
Personal Website :
Google Scholar Website :

    2011/10-2014/09, PhD in Nanomechanics, Tohoku University , Japan

    2009/10-2010/09, Joint Master Program, Tokyo Institute of Technology ,Japan

    2008/09-2011/04, Master of Engineering in Mechanical Engineering, Xi’an Jiaotong University, China

    2004/09-2008/06, Bachelor of Engineering in Mechanical Design, Manufacturing and Automation, Wuhan University, China


    2021/12-present, (Tenure-track) Associate Professor, Doctoral Supervisor, Tsinghua-Berkeley Shenzhen Institute (TBSI)/Tsinghua Shenzhen International Graduate School (SIGS), Tsinghua University

    2020/10-2021/11, (Tenure-track) Assistant Professor, Doctoral Supervisor, Tsinghua-Berkeley Shenzhen Institute (TBSI)/Tsinghua Shenzhen International Graduate School (SIGS), Tsinghua University

    2019/04-2020/09, (Non tenure-track) Assistant Professor, Tsinghua Shenzhen International Graduate School (SIGS), Tsinghua University

    2017/10-2019/03, (Non tenure-track) Assistant Professor, Graduate School at Shenzhen, Tsinghua University

    2017/01-2017/09 Research Assistant, Graduate School at Shenzhen, Tsinghua University

    2014/11-2016/12 Post-doctor, Graduate School at Shenzhen, Tsinghua University.

    2012/12-2013/01 Visiting scholar, Korea Advanced Institute of Science and Technology (KAIST)

    2011/11-2012/01 Visiting scholar, Graduate School at Shenzhen, Tsinghua University



    2023/05-present, Editorial member of the International Journal Optics and Precision Engineering

    2023/01-present, Chief Guest Editor, Special Issue on Machine Learning in Precision and Micro/Nano Metrology in Journal Nanomanufacturing and Metrology (NMME).

    2022/09-present, Secretary, Young Scientists Committee of International Society of Nanomanufacturing (ISNM)*.

    2017/01-present, Editorial member of the International Journal of Precision Engineering and Manufacturing (IJPEM)


    Academic Meetings

    2022/08/30-2022/09/01, Organizing Committee Member, Senssion Chair of nanoMAN2022 and AETS2022, online.

    2022/12/16-2022/12/17, Co-Chair, 2022 ISNM Symposium on Non-Conventional Manufacturing, Changchun, China.

    2022/09/23-2022/09/25, Co-Chair, 2022 ISNM Symposium on Measurement Technologies, Chongqing, China.

    2021/11/17-2021/11/19, Session Chair, the 7th International Conference on Nanomanufacturing, Xian, China.

    2021/01-2023/12, Director, Tsinghua SIGS-Nanning Joint Research Center for Intelligent Manufacturing.

    2020-present, Committee Member, Advanced Manufacturing Branch of CPC Tsinghua SIGS Committee.

    2019/09/01-2019/09/04, Session Chair, the 14th International Symposium on Measurement Technology andIntelligent Instrument (ISMTII 2019), Niigata, Japan.

    2019-present, Secretary, Steering Committee of Instrument Engineering Masters Degree of Tsinghua University.

    2018-present, Secretary, Defense Committee of Instrument Engineering Masters Degree of Tsinghua University.

    2018/08/08-2018/08/10,Session Chair, the 10th International Symposium on Precision Engineering Measurementsand Instrumentation (ISPEMI 2018), Kunming, China.

    2018/01-present, Editorial Board Member of SCI-indexed Journal IJPEM.


    *International Society for Nanomanufacturing (ISNM, https://www.isnm.org) was founded in 2006. ISNM is a leading international organization in the fields of manufacturing and metrology, with hundreds of members from different countries around the world. The purpose of ISNM is to provide a platform for experts, scholars, and industry professionals engaged in the fields of micro, nano, atomic, and close-to-atomic scale manufacturing and metrology worldwide. The society hosts a series of international conferences on nanomanufacturing (nanoMan), which is held biennially in different countries around the world and has developed into one of the major international conferences in the field of manufacturing and measurement. ISNM initiated the establishment of the journal Nanomanufacturing and Metrology (NMME) in 2018, which was published by Springer Nature. The journal collects relevant physical, chemical, and material science issues in micro, nano, atomic, and close-to-atomic scale manufacturing and metrology, as well as research, short messages, and review papers in the fields of tools, processes, equipment, and applications in micro, nano, atomic, and close-to-atomic scale manufacturing and metrology.

    Dean assistant for Institute of Data and Information, Tsinghua Shenzhen International Graduate School; Director of Tsinghua SIGS-Nanning Joint Intelligent Manufacturing Center

    During the past five years, I work on two areas for fulfilling requirements on precision and intelligence of advanced manufacturing, they are, precision metrology & instruments and intelligent production technologies & equipment. Six platforms are constructed, including holographic lithography enabled advanced grating fabrication, grating interferometry, chromatic confocal sensing, rapid and precision structured light enabled 3D reconstruction, SLAM for AGV, and artificial intelligence (AI) based automatic optical inspection (AOI). More than 60 peer-reviewed articles and proceedings about abovementioned areas were published, more than 20 patents were filed/granted, research fundings with a total amount of more than 15 million RMB were granted for supporting on platform construction, students training as well as technicians recruitment. There are 21 members graduating from or worked in my group, they are, 1 post-doctor, 2 doctors, 18 masters.

    Contributions of my research group can be categorized into six directions. Firstly, polarization manipulation enabled holographic lithography technique firstly proposed in my group allows fabrication of large area micro-nano structure array with high uniformity and periodic tunability, which greatly benefits today’s nano science and technology. Secondly, a hybrid planar grating with mixed coding firstly developed in my group brings an outstanding grating interferometric solution that owns advantages on multi-DOF, sub-nanometric, absolute and large stroke simultaneously. This is a proven prior choice for the most advanced positioning solution for lithography machine. Thirdly, in the chromatic confocal area, we completely solved the problem caused by reflectance variation of target surface and spectrum distribution imperfection existing in the light source by using a modified interpolation optical configuration and a self-reference strategy. Fourth, aiming for improvement of intelligence and flexibility in production process, we developed SLAM based AGV with sensing integration of vision, points cloud by Lidar and initial guiding IMU unit. Fifth, we proposed high precision target reconstruction via FPGA controlled MEMS mirror structured light system for a highly reliable and dynamic detection and positioning for various industrial robots. Lastly, we focused on transfer learning and deep learning techniques for highly efficient and accurate AOI application for many industrial situations. These outbreaking innovations and integration applications have been being employed in and are playing a significant role on advanced manufacturing of China.



    1. Technology and system of atomic-level ultra-precision measurement of heterodyne grating interferometry, Shenzhen Stable Supporting Program, 2023.12-2025.11,PI.

    2. Research on intelligent technology of on-line water quality analyzer, Enterprise cooperation, 2023.10-2025-09, PI.

    3. Large area hybrid grating processing technology research project, Enterprise cooperation, 2023.08-2025.02, PI.

    4. Absolute six-DOF nanometer/subarcsecond measurement mechanism and system based on hybrid coded planar grating, National Natural Science Foundation of China (NSFC), 2023.1-2026.12, PI.

    2. Research and development of key technologies of optical chip micro-vision inspection system, Entrepreneur Cooperation, 2021.11-2023.11, PI.

    3. 14nm lithography machine oriented multi-axes grating interferometry and dynamic error mechanism study, Natural Science Foundation of Guangdong Province, 2021.10-2024.9, PI.

    4. Ultrasonic assist and intelligent vision based highly effective manufacturing techniques, Joint Research Program of SIGS, Tsinghua University, 2021.10-2024.9, PI.

    5. Key technologies for self-learnable quality inspection, Shenzhen Stable Supporting Program, 2021.6-2024.5, co-PI.

    6. Tsinghua SIGS-Nanning Joint Intelligent Manufacturing Center, 2021.1-2023.12, PI.

    7. Study on fabrication of planar two-axis nano-grating with high shape uniformity for grating interferometry application, National Natural Science Foundation of China (NSFC), 2020.1-2022.12, PI.

    8. Intelligent lighting platform for multi-scene automatic optical inspection,  Entrepreneur Cooperation, 2019.5-2020.4, PI.

    9. Data fusion method and implementation of high precision interference ranging based on two-dimensional grating array, Youth Foundation of Tsinghua SIGS, 2018.7-2020.6, PI.

    10. Six-DOF surface encoder with long scale and high resolution, Natural Science Foundation of Guangdong Province, 2018.5-2021.4, PI.

    11. Research on Key Technologies of ultra-long scale and multi DOF precision grating ranging system, Shenzhen Fundamental Research Program, 2018.4-2021.3,co-PI.

    12. High speed IR Film thickness meter development, Entrepreneur Cooperation, 2017.6-2019.5, PI.

    13. Error detection of grating manufacturing and error compensation method of large range measurement, one of the branch National Key Research and Development Program of China, 2016.7-2019.6, co-PI.

    14. Research on manufacturing technology of key elements of grating interference ranging for high-end equipment, Shenzhen Fundamental Research Program, 2016.7-2018.6, PI.

    15. Key Technology study on fabrication of multi-axis grating by using interference lithography with semiconductor laser, China Postdoctoral Science Foundation Funded Project (Special Program), 2016.3-2016.12,PI.

    16. Research and development of the key technology of absolute two-dimensional grating ruler, Shenzhen Fundamental Research Program, 2015.7-2018.6, co-PI.

    17. Fabrication of one-dimensional scale grating by using stitching method with blu-ray laser dioder, China Postdoctoral Science Foundation Funded Project (General Program), 2015.3-2016.12, PI.

    18. Research on multi degree of freedom nano measurement system of dual frequency compound two-dimensional grating for optical component space pose monitoring, one of the branch NSFC, 2015.1-2019.12, co-PI.


    1. Yiming Li, Zhuang Li, Chaobo Zhang, Min Han, Fengxiao Lei, Xiaojun Liang*, Xiaohao Wang, Weihua Gui, Xinghui Li*. Deep learning-driven one-shot dual-view 3D reconstruction for dual-projector system[J]. IEEE Transactions on Instrumentation and measurement, 2023.

    2. Qiaolin Li, Yuki Shimizu, Xiaohao Wang, Xinghui Li*, Wei Gao. High-accuracy roundness measurement of small cylindrical workpieces by a high-frequency filtering method[J]. Precision Engineering, 2024, 85: 241-246.

    3. Kaiheng Huang, Qiaolin Li*, Kaixiong Zhu, Baihan Chen, Xiang Qian, Xiaohao Wang, Xinghui Li. A through-transmission ultrasonic method for the detection of ferrite tile defects[J]. Applied Sciences, 2023, 13: 11172.

    4. Min Han, Weijian Shi, Shihao Lu, Fengxiao Lei, Yiming Li, Xiaohao Wang, Xinghui Li*. Internal–External Layered Phase Shifting for Phase Retrieval[J].  IEEE Transactions on Instrumentation and measurement, 2023, 73: 4501013.

    5. Shuonan Shan#, Jingwen Li#, Peiyuan Liu, Qiaolin Li*, Xiaohao Wang, Xinghui Li*. A microlens array grating for miniature multi-channel spectrometers[J]. Sensors, 2023,23:8381.

    6. Qiaolin Li, Yifeng Wang, Jingwen Li, Xiaohao Wang, Xinghui Li*. Non-contact ultra-precision metrology of superfine cylinders with a developed two-dimensional coordinate measuring device[J]. Measurement, 2023, 223: 113727.

    7. Guangyao Huang#, Jiao Bai#, Feng Feng, Long Zeng, Pingfa Feng, Xinghui Li*. A hybrid strategy for profile measurement of micro gear teeth[J]. Micromachines, 2023, 14:1729.

    8. Min Han, Jiangming Kan, Gongping Yang, Xinghui Li*. Robust ellipsoid fitting using combination of axial and sampson distances[J]. IEEE Transactions on Instrumentation and measurement,2023, 72: 2526714.

    9. Jiao Bai, Jingwen Li, Xiaohao Wang, Xinghui Li*. Research Progress of high precision chromatic confocal displacement measurement technology[J]. Laser & Optoelectronics Progress, 2023, 60(3): 221-236.

    10. Gaopeng Xue, Liyu Lin, Qihang Zhai, Chuang Zeng, Xiaohao Wang, Xinghui Li*. Development of dielectric-film-based polarization modulation scheme for patterning highly uniform 2D array structures with periodic tunability[J]. Optics and Lasers in Engineering, 2023, 167: 107627.

    11. Shengtong Wang, Baiqi Liao, Ningning Shi, Xinghui Li*. A compact and high-precision three-degree-of-freedom grating encoder based on a quadrangular frustum pyramid prism[J]. Sensors, 2023, 23(8): 4022.

    12. Chen Li, Haoxin Yan, Xiang Qian, Shidong Zhu, Peiyuang Zhu, Chengwei Liao, Haoyang Tian, Xiu Li, Xiaohao Wang, Xinghui Li*. A domain adaptation YOLOv5 model for industrial defect inspection[J]. Measurement, 2023, 213: 112725.

    13. Min Han, Fengxiao Lei, Weijian Shi, Shihao Lu, Xinghui Li*. Uniaxial MEMS-based 3D reconstruction using pixel refinement[J]. Optics Express, 2023, 31(1): 536-554.

    14. Shengtong Wang, Linbin Luo, Junhao Zhu, Ningning Shi, Xinghui Li*. An ultra-precision absolute-type multi-degree-of-freedom grating encoder[J]. Sensors, 2022, 22(23): 9047.

    15. Feng Feng, Kexin Zhang, Xinghui Li*, Yousheng Xia,, Meng Yuan, Pingfa Feng*. Scaling region of weierstrass-mandelbrot function: improvement strategies for fractal ideality and signal simulation[J]. Fractal and Fractional, 2022, 6(10): 100542.

    16. Gaopeng Xue, Masaya Toda, Bing Li, Xinghui Li*, Takahito Ono. Demonstration of heterogeneous structure for fabricating a comb-drive actuator for cryogenic applications[J]. Micromachines, 2022, 13(8): 1287.

    17. Shounan Shan, Peiyuan Liu, Jingwen Li, Jiao Bai, Xiaohao Wang, Xinghui Li*. Fabrication of a micro lens array-grating for a miniature spectrometer[C]//Optical Design and Testing XII, SPIE, 2022, 12315: 325-334.

    18. Yifeng Wang, Ningning Shi, Liyong Li, Kai Ni, Xinghui Li*. Instantaneous grating signal subdivision system with non-linear kalman filters[C]//Optical Design and Testing XII, SPIE, 2022, 12315: 90-96.

    19. Qiuying Ma, Haoyang Yu, Qian Zhou, Xinghui Li*, Guanhao Wu, Kai Ni. A 209 MHz compact all-fiber er-doped mode-locked laser[C]//Advanced Lasers, High-power Lasers, and Applications XIII, SPIE, 2022, 12310: 70-75.

    20. Fuyuan Deng, Tianshi Lu, Qihang Zhai, Linbin Luo, Gaopeng Xue, Qian Zhou, Xiaohao Wang, Xinghui Li*. A four-step laser interference lithography for patterning pixelated micro-polarizer array[C]//Holography, Diffractive Optics, and Applications XII, SPIE, 2022, 12318: 349-355.

    21. Linbin Luo, Lyuye Gao, Shengtong Wang, Fuyuan Deng, Yonggui Wu, Xinghui Li*. An ultra-precision error estimation for a multi-axes grating encoder using quadrant photodetectors[C]//Optical Metrology and Inspection for Industrial Applications IX, SPIE, 2022, 12319: 57-65

    22. Weijian Shi, Shihao Lu, Yihao Tao, Gaopeng Xue, Fengxiao Lei, Xinghui Li*. FPGA enabled accurate angle-power matching method in MEMS mirrors-based structure light projection system[C]//Optical Metrology and Inspection for Industrial Applications IX, SPIE, 2022, 12319: 30-35.

    23. Shengtong Wang, Junhao Zhu, Ningning Shi, Linbin Luo, Yanxiang Wen, Xinghui Li*. Modeling and test of an absolute Four-degree-of-freedom (DOF) Grating Encoder[C]//Optical Metrology and Inspection for Industrial Applications IX, SPIE, 2022, 12319: 72-78.

    24. Qiuying Ma, Haoyang Yu, Qian Zhou, Xinghui Li*, Guanhao Wu, Kai Ni. A mode-locked fiber laser simulation platform for self-tuning algorithm optimization[C]//Optoelectronic Devices and Integration XI, SPIE, 2022, 12314, 130-134.

    25. Min Han, Fengxiao Lei, Yihao Tao, Weijian Shi, Shihao Lu, Haoyang Tian, Chengwei Liao, Peiyuan Zhu, Shidong Zhu, Xiaohao Wang, Xinghui Li*. A novel calibration method for a uniaxial MEMS-based 3D reconstruction system[C]//Optoelectronic Imaging and Multimedia Technology IX, SPIE, 2022, 12317, 40-46.

    26. Junhao Zhu, Guochao Wang, Shengtong Wang, Xinghui Li*. A Reflective-Type Heterodyne Grating Interferometer for Three-Degree-of-Freedom Subnanometer Measurement[J]. IEEE Transactions on Instrumentation and Measurement, 2022, 71: 7007509.

    27. Junhao Zhu, Shengtong Wang, Xinghui Li*. Ultraprecision grating positioning technology for wafer stage of lithography machine[J]. Laser & Optoelectronics Progress, 2022, 59(9): 320-336. (Invited Review)

    28. Yiming Li, Lin Yang, Xiaohao Wang, Shuonan Shan, Fuyuan Deng, Zhixue He, Zhengtong Liu, Xinghui Li*. Overlay metrology for lithography machine[J]. Laser & Optoelectronics Progress, 2022, 59(9): 391-402. (Invited Review)

    29. Ruiming Chen, Yiming Li, Gaopeng Xue*, Yihao Tao, Xinghui Li*. Laser triangulation measurement system with Scheimpflug calibration based on the Monte Carlo optimization strategy[J]. Optics Express, 2022, 30(14): 25290-25307.

    30. Jiao Bai, Jingwen Li, Xiaohao Wang, Qian Zhou, Kai Ni and Xinghui Li*. A new method to measure spectral reflectance and film thickness using a modified chromatic confocal sensor[J]. Optics and Lasers in Engineering, 2022, 154: 107019.

    31. Feng Feng, Meng Yuan, Yousheng Xia, Haoming Xu, Pingfa Feng, Xinghui Li*. Roughness scaling extraction accelerated by dichotomy-binary strategy and its application to milling vibration signal[J]. Mathematics, 2022, 10(7): 1105.

    32. Jiao Bai, Yingzuo Wang, Xiaohao Wang, Qian Zhou, Kai Ni, Xinghui Li*. Three-probe error separation with chromatic confocal sensors for roundness measurement[J]. Nanomanufacturing and Metrology, 2021, 4: 247-255.

    33. Jie Wang, Guangyao Huang, Guochao Wang*, Yaning Wang, Mei Hu, Qixue Li, Lingxiao Zhu, Xinghui Li, Shuhua Yan, Jun Yang. One-thousandth-level laser power stabilization based on optical feedback from a well-designed high-split-ratio and nonpolarized beam splitter[J]. Applied Optics, 2021, 60(25): 7798-7803.

    34. Guochao Wang, Gaopeng Xue, Qihang Zhai, Junhao Zhu, Kangning Yu, Guangyao Huang, Min Wang, Aihua Zhong, Lingxiao Zhu, Shuhua Yan, Xinghui Li*. Planar diffractive grating for magneto-optical trap application: fabrication and testing[J]. Applied Optics, 2021, 60(30): 9358-9364.

    35. Gaopeng Xue*, Masaya Toda, Xinghui Li, Xiaohao Wang, Takahito Ono. Magnetic resonance force microscopy with vacuum-packaged magnetic cantilever towards free radical detection[J]. IEEE Sensors Journal, 2021, 21(20): 22578-22586.

    36. Haoyang Yu, Qian Zhou, Xinghui Li, Xiaohao Wang, Xilin Wang, Kai Ni*. Improving resolution of dual-comb gas detection using periodic spectrum alignment method[J]. Sensors, 2021, 21(3): 903.

    37. Haoyang Yu, Qian Zhou, Xinghui Li, Xiaohao Wang, Kai Ni*. Phase-stable repetition rate multiplication of dual-comb spectroscopy based on a cascaded Mach–Zehnder interferometer[J]. Optics Letters, 2021, 46(13): 3243-3246.

    38. Haoyang Yu, Qian Zhou, Xinghui Li, Xiaohao Wang, Kai Ni*. Mode-resolved dual-comb spectroscopy using error correction based on single optical intermedium[J]. Optics Express, 2021, 29(4): 6271-6281.

    39. Kangning Yu, Junhao Zhu, Weihan Yuan, Qian Zhou, Gaopeng Xue, Guanhao Wu, Xiaohao Wang, Xinghui Li*. Two-channel six degrees of freedom grating-encoder for precision-positioning of sub-components in synthetic-aperture optics[J]. Optics Express, 2021, 29(14): 21113-21128.

    40. Gaopeng Xue, Qihang Zhai, Haiou Lu, Qian Zhou, Kai Ni, Liyu Lin, Xiaohao Wang, Xinghui Li*. Polarized holographic lithography system for high-uniformity microscale patterning with periodic tunability[J]. Microsystems & Nanoengineering, 2021, 7(1): 1-10.

    41. Jiao Bai, Xinghui Li*, Xiaohao Wang*, Jianjian Wang, Kai Ni, Qian Zhou, Self-reference dispersion correction for chromatic confocal displacement measurement[J]. Optics and lasers in Engineering, 2021, 140: 106540.

    42. Zehui Li, Yi Yuan, Hao Wu, Xinghui Li, Menglei Yuan, Huaizhang Wang, Xiaoxue Wu, Shuai Liu, Xianming Zheng, Mingjun Kim, Haoyun Zheng, Sadia Rehman, Guangya Jiang, Wangyang Fu, Jingkun Jiang*. Investigation of MOF-derived humidity-proof hierarchical porous carbon frameworks as highly-selective toluene absorbents and sensing materials[J]. Journal of Hazardous Materials, 2021, 411: 125034.

    43. Yuki Shimizu*, Liang-Chia Chen, Dae Wook Kim, Xiuguo Chen, Xinghui Li, Hiraku Matsukuma. An insight on optical metrology in manufacturing[J]. Measurement Science and Technology, 2021, 32(4): 042003.

    44. Guochao Wang*, Xinghui Li*, Shuhua Yan, Lilong Tan. Wenliang Guan. Real-time absolute distance measurement by multi-wavelength interferometry synchronously multi-channel phase-locked to frequency comb and analysis for the potential non-ambiguity range[J]. Acta Physica Sinica, 2021,70(4): 20201225.

    45. Yaping Shi, Qian Zhou, Xinghui Li*, Kai Ni, Xiaohao Wang. Design and testing of a linear encoder capable of measuring absolute distance[J]. Sensors and Actuators A: Physical, 2020, 308: 111935.

    46. Yaodong Han, Kai Ni, Xinghui Li*, Guanhao Wu, Kangning Yu, Qian Zhou, Xiaohao Wang. An FPGA platform for next-generation grating encoders[J]. Sensors, 2020, 20: 2266.

    47. Gaopeng Xue, Haiou Lu, Xinghui Li*, Qian Zhou, Guanhao Wu, Xiaoha Wang and Kai Ni. Patterning nanoscale crossed grating with high uniformity by using two-axis Lloyd’s mirrors based interference lithography[J]. Optics Express, 2020, 28(2): 2179-2191.

    48. Yaping Shi, Kai Ni, Xinghui Li*, Qian Zhou, Xiaohao Wang, Highly accurate, absolute optical encoder using a hybrid-positioning method[J]. Optics Letters, 2019, 44 (21): 5258-5231.

    49. Jiao Bai, Xinghui Li*, Qian Zhou, Kai Ni, Xiaohao Wang. Improved chromatic confocal displacement sensor based on a spatial-bandpass-filter and an X-shaped fiber-coupler[J]. Optics Express, 2019, 27(8): 10961-10973.

    50. Jiao Bai, Xinghui Li*, Xiaohao Wang, Qian Zhou, Kai Ni. Chromatic confocal displacement sensor with optimized dispersion probe and modified centroid peak extraction algorithm[J]. Sensors, 2019, 19(16): 3592.

    51. Jianxiong Li, Qian Zhou, Xinghui Li*, Ruiming Chen, and Kai Ni. An improved low-noise processing methodology combined with PCL for industry inspection based on laser line scanner[J]. Sensors, 2019, 19(15): 3398.

    52. Qian Zhou, Xinghui Li, Menglin Geng, Hiaifei Hu, Kai Ni*, Lunchao Zhong, Peng Yan, Xiaohao Wang*. Economic fabrication of a novel hybrid planar Grating/Fresnel lens for miniature spectrometers[J]. Optics Express, 2018, 26(5): 6079-6089.

    53. Xinghui Li, Qian Zhou, Xiangwen Zhu, Lin Yang, Donghan Ma, JIanhui Sun, Kai NI*, Xiaohao Wang*. Holographic fabrication of an arrayed one-axis scale grating for a two-probe optical linear encoder[J]. Optics Express, 2017, 25(13), 16028-16039.

    54. Xinghui Li, Kai Ni, Qian Zhou, Peng Yan, Jinchao Pang, and Xiaohao Wang. Improved master-replica separation process for fabrication of a blazed concave grating by using a combination-type convex grating[J]. Applied Optics, 2017, 56(2): 298-302.

    55. Xinghui Li, Huanhuan Wang, Kai Ni, Qian Zhou, Xinyu Mao, Lijiang Zeng, Xiaohao Wang, Xiang Xiao. Two-probe optical encoder for absolute positioning of precision stages by using an improved scale grating[J]. Optics Express, 2016, 24(19): 21378-21391.

    56. Xinghui Li, Wei Gao*, Yuki Shimizu, So Ito. A two-axis Lloyd’s mirror interferometer for fabrication of two dimensional diffraction gratings[J]. CIRP Annals-Manufacturing Technology, 2014, 63(1):461-464.

    57. Xinghui Li, Jinchao Zhang, Qian Zhou, Kai Ni, Jinchao Pang, Rui Tian, Design of a variable-line-spacing grating pattern for spectrometers based on a grating–fresnel device[J]. Optics Letters, 2016, 41(7): 1470-1473.

    58. Xinghui Li, Kai Ni, Qian Zhou, Xiaohao Wang, Rui Tian, Jinchao Pang, Fabrication of a concave grating with a large grid-constant via a novel dual-beam interference lithography method[J]. Optics Express, 2016, 24(9): 10759.

    59. Xinghui Li, Tadahiko Shinshi, Wataru Hijikata, Yoshihiro Morimoto, Development of a suspension type sliding planar motion table using magnetic fluid lubrication[J]. Review of Scientific Instruments, 2016, 87: 065003.

    60. Xinghui Li, Yuki Shimizu, So Ito, Wei Gao. Fabrication of scale gratings for surface encoders by using laser interference lithography with 405 nm laser diodes[J]. International Journal of Precision Engineering and Manufacturing, 2013, 14(11), 1979-1988 .

    61. Xinghui Li, Wei Gao, Hiroshi Muto, Yuki Shimizu, Ito So, Songyi Dian. A six-degree-of-freedom surface encoder for precision positioning of a planar motion stage[J]. Precision Engineering, 2013, 37(3): 771-781.

    62. Xinghui Li, Yuki Shimizu, Takeshi Ito, Yindi Cai, So Ito, Wei Gao. Measurement of six-degree-of-freedom planar motions by using a multi-probe surface encoder[J]. Optical Engineering, 2014, 53(12): 094002.

    63. Qian Zhou, Xiaorui Qiao, Kai Ni, Xinghui Li*, Xiaohao Wang. Depth detection in interactive projection system based on one-shot black-and-white stripe pattern[J]. Optics Express. 2017, 25(5): 5341-5351.

    64. Qian Zhou, Jinchao Pang, Xinghui Li*, Kai Ni, Rui Tian. Improving the spectral resolution of flat-field concave grating miniature spectrometers by dividing a wide spectral band into two narrow ones[J]. Applied Optics, 2015, 54(32): 9450-9455 .

    65. Qian Zhou, Jinchao Pang, Xinghui Li*, Kai Ni, Rui Tian. Concave grating miniature spectrometer with an expanded spectral band by using two entrance slits[J]. Chines Optics Letters, 2015, 13(11): 110501.

    66. Xinghui Li, Xiang Xiao, Kai Ni*, Qian Zhou, Huanhuan Wang, Xiaohao Wang. A precise reference position detection method for linear encoders by using a coherence function algorithm[C]//Optical Metrology and Inspection for Industrial Applications IV, SPIE, 2016, 10023: 278-282.

    67. 李星輝,清水裕樹,伊東聡,高偉. 2軸ロイドミラー干渉によるスケール格子製作する研究,日本機械学会東北支部第49期総会講演会講演論文集, 2014.【日语】



    1. Xinghui Li, Shuonan Shan, Tianshi Lu, Fuyuan Deng, Xiaohao Wang. A method for self-aligning and  processing multilayer gratings: CN117270092A[P]. 2023-12-22.

    2. Xinghui Li, Shengtong Wang, Linbin Luo. An absolute six-degree-of-freedom pose sensor:CN116592771A [P]. 2023-08-15.

    3. Xinghui Li, Guangyao Huang, Feng Feng, Xiaohao Wang. A gear profile measurement system and method: CN116164693A[P]. 2023-05-26.

    4. Xiang Qian, Hao Wang, Xinghui Li, Xiaohao Wang. An interactive industrial cold start defect detection system and method: CN115953385A[P]. 2023-04-11.

    5. Xinghui Li, Fuyuan Deng, Tianshi Lu. A method, a mask, a substrate and a stage for manufacturing a micro-polarizing plate array: CN115903409A[P]. 2023-04-04.

    6. Xinghui Li, Shuonan Shan, Yiming Li, Fuyuan Deng, Xiaohao Wang. A high-resolution overlay error measuring device and method: CN115390368A[P]. 2022-11-25.

    7. Xinghui Li, Fuyuan Deng, Yiming Li, Shuonan Shan, Xiaohao Wang. A precise focusing overlay error measurement system and method: CN115390369A[P]. 2022-11-25.

    8. Xiang Qian, Junzhao Wang, Xinghui Li, Xiaohao Wang. Magnetic tile geometric size detection method and device: CN115170640A[P]. 2022-10-11.

    9. Xinghui Li, Gaopeng Xue, Yihao Tao. A coded structured light projection method and system: ZL202210156189.8[P]. 2023-12-01.

    10. Xinghui Li, Shengtong Wang. An absolute grating encoder with six degrees of freedom: ZL202210155113.3[P]. 2023-07-28.

    11. Xinghui Li, Yiming Li, Xiaohao Wang. A multi-channel high-precision overlay error detection system and method: CN114578657A[P]. 2022-06-03.

    12. Xinghui Li, Min Han. A method for obtaining folded phase, three-dimensional reconstruction method and system: ZL202210085619.1[P]. 2023-06-02.

    13. Xinghui Li, Yiming Li, Xiaohao Wang. A high-precision overlay measurement value traceability method and scatterometer: ZL202111558740.3[P]. 2023-11-07.

    14. Gaopeng Xue, Xinghui Li, Xiaohao Wang. Magnetic cantilever beam sensor and manufacturing method, measurement device and imaging system: ZL202111400243.0[P]. 2023-08-29.

    15. Xinghui Li, Kangning Yu, Xiaohao Wang. A six-dimensional force sensor:  ZL202111172303.8[P]. 2023-10-13.

    16. Xinghui Li, Peiyuan Liu, Jiao Bai, Xiaohao Wang. Fresnel grating microlens array, spectrometer and spectral confocal surface measurement system: ZL202111078906.1[P]. 2023-10-17.

    17. Xiang Qian, Zhiyuan Cheng, Kaixiong Zhu, Xinghui Li, Shidong Zhu, Xiaohao Wang. A device and method for detecting internal defects of magnetic tiles: ZL202110461539.7[P]. 2022-08-26.

    18. Gaopeng Xue, Xinghui Li, Xiaohao Wang. A MEMS device with a silicon-based piezoresistive sensor: ZL202110380700.8[P]. 2023-07-18.

    19. Xinghui Li, Jiao Bai, Xiaohao Wang. Spectral reflectivity detection method, system, equipment and computer-readable storage medium: ZL202110286141.4[P]. 2021-07-20.

    20. Gaopeng Xue, Xinghui Li, Xiaohao Wang. An electrostatic comb-driven in-plane two-dimensional positioning platform with low crosstalk motion: ZL202110082495.7[P]. 2022-06-28.

    21. Shidong Zhu, Xing Ye, Xiaohao Wang, Xiang Qian, Xinghui Li. A method for making a heart model and a mold for making the same: CN112092409A[P]. 2020-12-18.

    22. Xinghui Li, Kangning Yu, Qian Zhou, Guanhao Wu, Kai Ni, Xiaohao Wang. Detection system, detection method and grating ruler: ZL202010817814.X[P]. 2022-06-21.

    23. Kai Ni, Haoyang Yu, Qian Zhou, Xinghui Li, Xiaohao Wang. Dual optical frequency comb system and its offset frequency control method: ZL202010747324.7[P]. 2022-02-01.

    24. Xinghui Li, Ruiming Chen, Xiaohao Wang, Qian Zhou, Kai Ni. Sensor, sensor calibration method equipment, storage medium: ZL202010420953.9[P]. 2023-01-10.

    25. Kai Ni, Hancheng Chen, Haoyang Yu, Qian Zhou, Xinghui Li, Xiaohao Wang. Dual femtosecond laser frequency comb ranging device and method: ZL202010265852.9B[P]. 2022-05-10.

    26. Qian Zhou, Kai Ni, Yinyin Chao, Weiqi Wang, Benfeng Bai, Xinghui Li, Xiaohao Wang. Metal polarizing plate and production method: ZL201910798261.5[P]. 2023-11-17.

    27. Qian Zhou, Kai Ni, Yinyin Chao, Benfeng Bai, Weiqi Wang, Xinghui Li, Xiaohao Wang. A method for making a micro-polarizing plate template: CN110568720A[P]. 2019-12-13.

    28. Xinghui Li, Yaping Shi, Qian Zhou, Kai Ni, Xiaohao Wang. An absolute grating ruler reference position measurement method and system: ZL201910654027.5[P]. 2021-10-22.

    29. Feng Feng, Xinghui Li, Wenmeng Zhou, Binbin Liu, Junlong Huang, Pingfa Feng. A method for quickly measuring the relationship between surface roughness and measuring scale: ZL201910569990.3[P]. 2020-08-25.

    30. Kai Ni, Ruyu Ma, Qian Zhou, Xinghui Li. An angular velocity measurement method, measurement system and carrier: CN110160515B[P]. 2020-12-22.

    31. Kai Ni, Ruyu Ma, Qian Zhou, Xinghui Li. Angular velocity measurement method, device and application system:  ZL201910299404.8[P]. 2020-12-22.

    32. Xinghui Li, Hao Wu, Xiaohao Wang, Qian Zhou, Kai Ni. An internal circulation particle concentration detection device: CN109596495A[P]. 2019-04-09.

    33. Xinghui Li, Jianxiong Li, Qian Zhou, Kai Ni, Xiaohao Wang. Beam alignment device and alignment method of symmetrically arranged laser displacement sensor: CN109668512A[P]. 2019-04-23.

    34. Xinghui Li, Ruiming Chen, Kai Ni, 白蛟, Xiaohao Wang, Qian Zhou. A laser imaging ranging method and system: CN109405749A[P]. 2019-03-01.

    35. Xinghui Li, Hao Wu. A particle sedimentation quality measurement device and its sedimentation efficiency detection method: CN109283105A[P]. 2019-01-29.

    36. Xinghui Li, Hao Wu, Xiaohao Wang, Qian Zhou, Kai Ni. A crystal cleaning device and crystal cleaning method based on piezoelectric measurement: ZL201811173023.7[P]. 2023-11-17.

    37. Kai Ni, Ruyu Ma, Haoyang Yu, Qian Zhou, Guanhao Wu, Xinghui Li, Xiaohao Wang. Angular velocity measurement device, method and vehicle: ZL201811175104.0[P]. 2020-08-04.

    38. Haoyang Yu, Ruyu Ma, Kai Ni, Guanhao Wu, Qian Zhou, Xinghui Li, Xiaohao Wang. A hierarchically controlled temperature control box, control method and femtosecond frequency flow: CN109002070A[P]. 2018-12-14.

    39. Haoyang Yu, Ruyu Ma, Kai Ni, Guanhao Wu, Qian Zhou, Xinghui Li, Xiaohao Wang. Optical path structure, system, method, device and storage medium for dual optical frequency comb thickness measurement: CN109238153A[P]. 2019-01-18.

    40. Xinghui Li, Haiou Lu, Qian Zhou, Xiaohao Wang, Weihan Yuan, Kai Ni, Guanhao Wu. Detection system, splicing system, detection method, splicing method and splicing grating ruler: CN109163659A[P]. 2019-01-08.

    41. Xinghui Li, Xiang Xiao, Kai Ni, Qian Zhou, Weihan Yuan, Haiou Lu, Lijiang Zeng, Xiaohao Wang. A large-range interference grating ruler and its distance measurement method: ZL201810764638.0[P]. 2020-07-03.

    42. Xiaohao Wang, Peiyuan Zhu, Xiang Qian, Xinghui Li, Feng Feng, Qian Zhao. A single-line laser three-dimensional contour scanning device and method: CN108534710B[P]. 2020-02-14.

    43. Qian Zhou, Kai Ni, Xiang Xiao, Xinghui Li, Huanhuan Wang, Lijiang Zeng, Xiao Su, Weihan Yuan, Xiaohao Wang. A device and method for judging the reference position of a grating ruler: ZL201810069996.X[P]. 2023-08-22.

    44. Xinghui Li, Qian Zhou, Xiang Xiao, Kai Ni, Huanhuan Wang, Xinyu Mao, Lijiang Zeng, Xiao Su, Xiaohao Wang. A device and method for judging the absolute position of the reference point of the grating ruler: ZL201810069463.1[P]. 2023-08-11.

    45. Shidong Zhu, Lin Luo, Xiaohao Wang, Xinghui Li, Kai Ni, Qian Zhou. An auxiliary device for ventricular failure with external aortic counterpulsation:  ZL201711425070.1[P]. 2023-11-17.

    46. Xinghui Li, Kai Ni, Huanhuan Wang, Qian Zhou, Xiaohao Wang, Xinyu Mao, Lijiang Zeng, Xiang Xiao. 絶対式の格子スケ. 特许第6641650号(特2018-552216, 2020-01-08. in Japanese

    47. Kai Ni, Xinghui Li, Xiang Xiao, Qian Zhou, Huanhuan Wang, Lijiang Zeng, Weihan Yuan, Xiao Su, Xiaohao Wang. A multi-coded grating ruler: CN106500606B[P]. 2022-02-25.

    48. Xinghui Li, Kai Ni, Xiang Xiao, Qian Zhou, Huanhuan Wang, Lijiang Zeng, Weihan Yuan, Xiao Su, Xiaohao Wang. A grating diffracted light deflecting prism: ZL201611217716.2[P]. 2023-01-24.

    49. Qian Zhou, Kai Ni, Kai Hu, Lidai Wang, Xiaohao Wang, Xinghui Li, Hao Dong, Lanlan Wang. An underwater detection system and underwater detection method: ZL201610235054.5[P]. 2017-11-17.

    50. Xinghui Li, Kai Ni, Huanhuan Wang, Qian Zhou, Xiaohao Wang, Xinyu Mao, Lijiang Zeng, Xiang Xiao. An absolute grating ruler: ZL201610234556.6[P]. 2018-02-09.

    51. Qian Zhou, Jinchao Zhang, Xinghui Li, Kai Ni, Jinchao Pang,  Haifei Hu, Hao Dong, Huanhuan Wang, Xiangwen Zhu, Lanlan Wang. Optimized design method for making Fresnel gratings: ZL201510225311.2[P]. 2018-07-20.

    52. 清水裕, , , 李星. リソグラフィにおける2次元パタンの一括露光手法. 日本发明专利, 2014-099529.in Japanese



    1. Xinghui Li, Yaodong Han. Design of grating ruler displacement real-time settlement system based on FPGA: 2020SR0286738.

    2. Xinghui Li, Peirong Wang. Positioning and navigation system algorithm based on RGBD camera: 2020R11L304726.

  • 荣誉和奖项HONORS & AWARDS

    2023.05 Silver medal at the Paris International Exhibition of Inventions

    2023.04 Silver medal at the Salon International des Inventions in Geneva

    2022.11 Guangdong province postgraduates academic forum Best Oral Presentation

    2022.09 Top 100 projects of strategic emerging Industrial clusters in the Guangdong-Hong Kong-Macao Greater Bay Area High Value Patent Cultivation Layout Competition

    2022.09 The 8th International Conference on Nanomanufacturing & The 4th AET Symposium on ACSM and Digital Manufacturing Best Paper Award.

    2022.01 Outstanding Contribution Award, International Journal of Nanomanufacturing and Metrolgoy (NNME)

    2021.06 Excellent Communist in Tsinghua Shenzhen International Graduate School, Tsinghua University

    2021.06 Supervision of Excellent Master Degree Thesis of Tsinghua University

    2021.04 The 16th IEEE International Conference on Nano/Micro Engineering & Molecular System Best Conference Paper Award

    2020.07 Excellent Award, Excellent Teacher in On-line Teaching under COVID-19

    2019.06 Excellent Communist of Tsinghua Shenzhen International Graduate School, Tsinghua University

    2017.03 Highly Cited Research Elsevier

    2016.12Excellent Post-doctor  Tsinghua University

    2015.03 Tohoku President’s Award, Tohoku University

    2012.12 Excellent Speech, Japan Society of Precision Engineering

    2011.06 MonbukagakuSho Scholarship Japan Government

    2009.10 Excellent Student Scholarship Japan Government

    2008.06 Excellent Graduate, Wuhan University

    2008.06 Excellent Communist,Wuhan University

    2007.05 First Prize of Science and technology competition in Wuhan University

    2007.12 ASML Scholarship ASML

    2006.06 Third Prize of Science and technology competition in Hubei Province



    《Metrology in Semiconductor Industry》(In English),from 2023, 48 Class Hours

    《Test and Measurement Technology》(In English), 2017-2022, 48 Class Hours

    《Optical Measurement Experiments》(In Chinese, joint), from 2017, 16/32 Class Hours

    《Robotics and Radiology》(In Chinese, joint), from 2020, 24/32 Class Hours

    《Instrument Industry》(In Chinese, joint), from 2020, 16/32 Class Hours

    《Technical Writing》(In Chinese, joint), from 2021, 16/32 Class Hours

    《Manufacturing Technology I》(In English, joint),from 2021, 18/48 Class Hours

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