Xinghui Li

Associate Professor
Email : li.xinghui@sz.tsinghua.edu.cn
Phone : 86-755-26032544
Office Loction : Information Building 1506
Personal Website :
Google Scholar Website :

    10/2011-09/2014, Ph.D., Nanomechanics, Tohoku University (Japan);

    04/2011-09/2011, Xi'an Jiaotong University (China), Ph.D Student/Drop out;

    09/2008-03/2011, Master, Mechatronic Engineering, Xi’an Jiaotong University (China);

    10/2009-09/2010, Joint Master Program, Tokyo Institute of Technology (Japan);

    09/2004-06/2008, Bachelor, Mechanical Design, Manufacturing and Automation, Wuhan University (China) 


    2021/12-present, (Tenure-track) Associate Professor, Tsinghua-Berkeley Shenzhen Institute (TBSI)/Tsinghua Shenzhen International Graduate School (SIGS), Tsinghua University;

    2020/10-2021/11, (Tenure-track) Assistant Professor, Tsinghua-Berkeley Shenzhen Institute (TBSI)/Tsinghua Shenzhen International Graduate School (SIGS), Tsinghua University;

    2017/10-2020/09, (Non tenure-track) Assistant Professor, Graduate School at Shenzhen, Tsinghua University;

    2017/01-2017/09  Research Assistant, Graduate School at Shenzhen, Tsinghua University;

    2014/11-2016/12  Post-doctor, Graduate School at Shenzhen, Tsinghua University;



    1. Director, Tsinghua SIGS-Nanning Joint Research Center for Intelligent Manufacturing, 2021.1-2023.12

    2. Secretary, Steering Committee of Instrument Engineering Master's Degree of Tsinghua University, from 2019

    3. Secretary, Defense Committee of Instrument Engineering Master's Degree of Tsinghua University, from 2018

    4. Committee Member, Advanced Manufacturing Branch of CPC Tsinghua SIGS Committee, from 2020


    1. Organizing Committee Member of nanoMAN2022 and AETS2022, Aug 30-Sep 1, online

    2. Member of Editor Board, International Journal of Precision Engineering and Manufacturing (IJPEM), KSPE, from 2017

    3. Co-Chair of Organizing Committee, the 9th international conference on Positioning Technology, ICPT 2020

    4. Session Chair, the 7th International Conference on Nanomanufacturing, Nov 17-19, 2021, Xi'an China

    5. Session Chair, 14th international symposium on measurement technology and intelligent instruments, Niggata, Japan, ISMTII2019

    6. Session Chair, Signal Processing and Image Processing, 10th International Symposium on Precision Engineering Measurements and Instrumentation, Kunming, China, ISPEMI 2018

    7. Senior Member, Chinese Society of Micro and Nano Technology

    8. Member, Japanese Society of Precision Engineering

    9. Reviewer of the following journals: IEEE Transactions on Instrumentation & Measurement, IJPEM, Optics Express, Applied Optics, Optics Communication, CJME, Nanoscale Advances and Optik.


    During the past five years, I work on two areas for fulfilling requirements on precision and intelligence of advanced manufacturing, they are, precision metrology & instruments and intelligent production technologies & equipment. Six platforms are constructed, including holographic lithography enabled advanced grating fabrication, grating interferometry, chromatic confocal sensing, rapid and precision structured light enabled 3D reconstruction, SLAM for AGV, and artificial intelligence (AI) based automatic optical inspection (AOI). More than 60 peer-reviewed articles and proceedings about abovementioned areas were published, more than 20 patents were filed/granted, research fundings with a total amount of more than 15 million RMB were granted for supporting on platform construction, students training as well as technicians recruitment. There are 21 members graduating from or worked in my group, they are, 1 post-doctor, 2 doctors, 18 masters.

    Contributions of my research group can be categorized into six directions. Firstly, polarization manipulation enabled holographic lithography technique firstly proposed in my group allows fabrication of large area micro-nano structure array with high uniformity and periodic tunability, which greatly benefits today’s nano science and technology. Secondly, a hybrid planar grating with mixed coding firstly developed in my group brings an outstanding grating interferometric solution that owns advantages on multi-DOF, sub-nanometric, absolute and large stroke simultaneously. This is a proven prior choice for the most advanced positioning solution for lithography machine. Thirdly, in the chromatic confocal area, we completely solved the problem caused by reflectance variation of target surface and spectrum distribution imperfection existing in the light source by using a modified interpolation optical configuration and a self-reference strategy. Fourth, aiming for improvement of intelligence and flexibility in production process, we developed SLAM based AGV with sensing integration of vision, points cloud by Lidar and initial guiding IMU unit. Fifth, we proposed high precision target reconstruction via FPGA controlled MEMS mirror structured light system for a highly reliable and dynamic detection and positioning for various industrial robots. Lastly, we focused on transfer learning and deep learning techniques for highly efficient and accurate AOI application for many industrial situations.   These outbreaking innovations and integration applications have been being employed in and are playing a significant role on advanced manufacturing of China.  

  • 荣誉和奖项HONORS & AWARDS

    2022.1 Outstanding Contribution Award, International Journal of “Nanomanufacturing and Metrolgoy”

    2021.7 Supervision of Excellent Master Degree Thesis of Tsinghua University

    2021.7 Excellent Communist Tsinghua Shenzhen International Graduate School, Tsinghua University

    2020.7 Excellent Award, Excellent Teacher in On-line Teaching under COVID-19, 2019-2020

    2019.6 Excellent Communist Tsinghua Shenzhen International Graduate School, Tsinghua University

    2017.3 Highly Cited Research Elsevier

    2016.12 Excellent Post-doctor Tsinghua University

    2015.03 Tohoku President’s Award Tohoku University

    2012.12 Excellent Speech Japan Society of Precision Engineering

    2007.05 First Prize of Science and technology competition Wuhan University

    2006.06 Third Prize of Science and technology competition Hubei Province

    2008.6 Excellent Graduate Wuhan University

    2008.6 Excellent Communist Wuhan University

    2011.6 MonbukagakuSho Scholarship Japan Government

    2007.12 ASML Scholarship   ASML

    2009.10 Excellent Student Scholarship Japan Government


    Current Courses/现教课程:

    Test and Measurement Technology(In English), form 2017, 48 Class Hours

    Optical Measurement Experiments(In Chinese, joint), from 2017, 16/32 Class Hours

    Robotics and Radiology(In Chinese, joint), from 2020, 24/32 Class Hours

    Instrument Industry(In Chinese, joint), from 2020, 16/32 Class Hours

    Technical Writing(In Chinese, joint), from 2021, 16/32 Class Hours

    Manufacturing Technology I(In English, joint),from 2021, 18/48 Class Hours

  • 硕士生&博士生指导MASTER'S & PHD ADVISING

    PhD Advising: Sensor, Measurement and Control
    Master's Advising: Precision Instrument, Machine vision, Advanced manufacturing


    Selected Publications/发表论文

    1.Junhao Zhu, Shengtong Wang, Xinghui Li*, Ultraprecision grating positioning technology for wafer stage of lithography machine, Laser & Optoelectronics Progress, Volume 59, No.9, 09220191-17(Invited Review, in Chinese)

    2.Yiming Li, Lin Yang, Xiaohao Wang, Shuonan Shan, Fuyuan Deng, Zhixue He, Zhengtong Liu, Xinghui Li*, Overlay metrology for lithography machine, Laser & Optoelectronics Progress, Volume 59, No.9, 09220231-12(Invited Review, in Chinese)

    3.Ruiming Chen, Yiming Li, Gaopeng Xue*, Yihao Tao, and Xinghui Li*. (2022). Laser triangulation measurement system with Scheimpflug calibration based on the Monte Carlo optimization strategy. Optics Express, 30(14), 25290-25307.

    4.Jiao Bai, Jingwen Li, Xiaohao Wang, Qian Zhou, Kai Ni and Xinghui Li*. (2022). A new method to measure spectral reflectance and film thickness using a modified chromatic confocal sensor. Optics and Lasers in Engineering, 154, 107019.

    5.Feng, F., Yuan, M., Xia, Y., Xu, H., Feng, P., and Xinghui Li*. (2022). Roughness Scaling Extraction Accelerated by Dichotomy-Binary Strategy and Its Application to Milling Vibration Signal. Mathematics, 10(7), 1105.

    6.Bai, J., Wang, Y., Wang, X., Zhou, Q., Ni, K., & Xinghui Li*. (2021). Three-Probe Error Separation with Chromatic Confocal Sensors for Roundness Measurement. Nanomanufacturing and Metrology, 4(4), 247-255.

    7.Jie, W., Guangyao, H., Guochao, W., Yaning, W., Mei, H., Qixue, Xinghui Li, ... & Jun, Y. (2021). One-thousandth-level laser power stabilization based on optical feedback from a well-designed high-split-ratio and nonpolarized beam splitter. Applied Optics, 60(25), 7798-7803.

    8.Wang, G., Xue, G., Zhai, Q., Zhu, J., Yu, K., Huang, G., ... & Xinghui Li (2021). Planar diffractive grating for magneto-optical trap application: fabrication and testing. Applied Optics, 60(30), 9358-9364.

    9.Xue, G., Toda, M., Xinghui Li,, Wang, X., & Ono, T. (2021). Magnetic Resonance Force Microscopy With Vacuum-Packaged Magnetic Cantilever Towards Free Radical Detection. IEEE Sensors Journal.

    10.Yu, H., Zhou, Q., Xinghui Li, Wang, X., Wang, X., & Ni, K. (2021). Improving Resolution of Dual-Comb Gas Detection Using Periodic Spectrum Alignment Method. Sensors, 21(3), 903.

    11.Yu, H., Qian, Z., Xinghui, Li, Wang, X., & Ni, K. (2021). Phase-stable repetition rate multiplication of dual-comb spectroscopy based on a cascaded Mach–Zehnder interferometer. Optics Letters, 46(13), 3243-3246.

    12.Yu, H., Zhou, Q., Xinghui, Li, Wang, X., & Ni, K. (2021). Mode-resolved dual-comb spectroscopy using error correction based on single optical intermedium. Optics Express, 29(4), 6271-6281.

    13.Yu, K., Zhu, J., Yuan, W., Zhou, Q., Xue, G., Wu, G., ... & Xinghui Li* (2021). Two-channel six degrees of freedom grating-encoder for precision-positioning of sub-components in synthetic-aperture optics. Optics Express, 29(14), 21113-21128.

    14.Xue, G., Zhai, Q., Lu, H., Zhou, Q., Ni, K., Lin, L., ... & Xinghui Li* (2021). Polarized holographic lithography system for high-uniformity microscale patterning with periodic tunability. Microsystems & Nanoengineering, 7(1), 1-10.

    15.Jiao Bai, Xinghui Li*, Xiaohao Wang*, Jianjian Wang, Kai Ni, Qian Zhou, Self-reference dispersion correction for chromatic confocal displacement measurement, Optics and lasers in Engineering, 2021, 140, 106540:1-8 (SCI, JCR Q1, IF:4.273)

    16.Zehui Li#; Yi Yuan#; Hao Wu#; Xinghui Li; Menglei Yuan; Huaizhang Wang; Xiaoxue Wu; Shuai Liu; Xianming Zheng; Mingjun Kim; Haoyun Zheng; Sadia Rehman; Guangya Jiang*; Wangyang Fu, Investigation of MOF-derived Humidity-proof Hierarchical Porous Carbon Frameworks as Highly-selective Toluene Absorbents and Sensing Materials, Journal of Hazardous Materials, 2021, accepted for publication (2021.1.7) (SCI, JCR Q1, IF:9.038)

    17.Yuki Shimizu, Liang-Chia Chen, Dae Wook Kim, Xiuguo Chen, Xinghui Li, Hiraku Matsukuma, An insight on optical metrology in manufacturing, Measurement Science and Technology, 2020, in press. https://doi.org/10.1088/1361-6501/abc578 Accepted Manuscript online 28 October 2020 (SCI, JCR Q2, IF:1.857)

    18.王国超*,李星辉*,颜树华,谭立龙,管文良, 物理学报, 基于飞秒光梳的多路同步锁模的多波长干涉实时绝对测距及其非模糊度量程分析Real-time absolute distance measurement by multi-wavelength interferometry synchronously multi-channel phase-locked to frequency comb and analysis for the potential non-ambiguity range, 物理学报 Acta Phys Sin, 2021,70 4, 040601-1 (SCI, Q4, IF:0.732)

    19.Yaping Shi, Qian Zhou, Xinghui Li*, Kai Ni and Xiaohao Wang, Design and testing of a linear encoder capable of measuring absolute distance, Sensors and Actuators A: Physical, 111935

    20.Yaodong Han, Kai Ni, Xinghui Li*, Guanhao Wu, Kangning Yu, Qian Zhou and Xiaohao Wang, An FPGA Platform for Next-Generation Grating Encoders, Sensors 2020, 20, 2266; doi:10.3390/s20082266

    21.GaoPeng Xue, Haiou Lu, Xinghui Li*, Qian Zhou, Guanhao Wu, Xiaoha Wang and Kai Ni, Patterning nanoscale crossed grating with high uniformity by using two-axis Lloyd’s mirrors based interference lithography, Optics Express, 2020, Vol. 28(2): 2179-2191. (SCI, JCR Q1, IF:3.561)

    22.Yaping Shi, Kai Ni, Xinghui Li*, Qian Zhou and Xiaohao Wang, Highly accurate, absolute optical encoder using a hybrid-positioning method, Optics Letters, 2019, Vol. 44 (21): 5258-5231 (SCI, JCR Q1, IF:3.866)

    23.Jiao Bai, Xinghui Li*, Qian Zhou, Kai Ni, Xiaohao Wang. Improved chromatic confocal displacement sensor based on a spatial-bandpass-filter and 04an X-shaped fiber-coupler. OPTICS EXPRESS, 2019, 27(8): 10961-10973. (SCI, JCR Q1, IF:3.561)

    24.Jiao Bai, Xinghui Li*, Xiaohao Wang, Qian Zhou and Kai Ni. Chromatic Confocal Displacement Sensor with Optimized Dispersion Probe and Modified Centroid Peak Extraction Algorithm. Sensors, (2019) 19(16), 3592. (SCI, JCR Q1, IF:3.031)

    25.Jianxiong Li, Qian Zhou, Xinghui Li*, Ruiming Chen, and Kai Ni, An Improved Low-Noise Processing Methodology Combined with PCL for Industry Inspection Based on Laser Line Scanner. Sensors, (2019)19(15), 3398. (SCI, JCR Q1, IF:3.031)

    26.Qian Zhou#, Xinghui Li #, Menglin Geng, Hiaifei Hu, Kai Ni, Lunchao Zhong, Peng Yan, and Xiaohao Wang, Economic fabrication of a novel hybrid planar Grating/Fresnel lens for miniature spectrometers, Optics Express, Vol. 26, No. 5, 2018. (SCI, JCR Q1, IF:3.561)

    27.Xinghui Li, Qian Zhou, Xiangwen Zhu, Lin Yang, Donghan Ma, JIanhui Sun, Kai NI*, Xiaohao Wang* Holographic fabrication of an arrayed one-axis scale grating for a two-probe optical linear encoderOptics Express, Optics Express, 25(13), 16028-16039,(2017).

    28.Xinghui Li, Kai Ni, Qian Zhou, Peng Yan, Jinchao Pang, and Xiaohao Wang, Improved master-replica separation process for fabrication of a blazed concave grating by using a combination-type convex grating, Applied Optics. 56(2): 298 (2017). (SCI, JCR 二区,IF: 1.598)

    29.Xinghui Li, Huanhuan Wang, Kai Ni, Qian Zhou, Xinyu Mao, Lijiang Zeng, Xiaohao Wang, and Xiang Xiao, Two-probe optical encoder for absolute positioning of precision stages by using an improved scale grating, Optics Express. 24(19):21378(2016). (SCI, JCR一区,IF3.488)

    30.Xinghui Li, Wei Gao, Yuki Shimizu, So Ito, A two-axis Lloyd’s mirror interferometer for fabrication of two dimensional diffraction gratings, CIRP Annals-Manufacturing Technology.63(1):461-464 (2014).(SCI, JCR一区,IF2.541)

    31.Xinghui Li, Jinchao Zhang, Qian Zhou, Kai Ni, Jinchao Pang, Rui Tian, Design of a variable-line-spacing grating pattern for spectrometers based on a grating–Fresnel device, Optics Letters .41(7):1470-1473(2016). (SCI, JCR 一区,IF3.292)

    32.Xinghui Li, Kai Ni, Qian Zhou, Xiaohao Wang, Rui Tian, Jinchao Pang, Fabrication of a concave grating with a large grid-constant via a novel dual-beam interference lithography method, Optics Express. 24(9):10759(2016). (SCI, JCR一区,IF3.488)

    33.Xinghui Li, Tadahiko Shinshi, Wataru Hijikata, Yoshihiro Morimoto, Development of a suspension type sliding planar motion table using magnetic fluid lubrication, Review of Scientific Instruments. 87:065003 (2016). (SCI, JCR二区,IF1.336)

    34.Xinghui Li, Yuki Shimizu, So Ito, Wei Gao, Fabrication of scale gratings for surface encoders by using laser interference lithography with 405 nm laser diodes, International Journal of Precision Engineering and Manufacturing:14(11), 1979-1988 (2013).( SCI, JCR二区,IF:1.585)

    35.Xinghui Li, Wei Gao, Hiroshi Muto, Yuki Shimizu, Ito So, Songyi Dian, A six-degree-of-freedom surface encoder for precision positioning of a planar motion stage, Precision Engineering. 37(3):771-781 (2013). (SCI, JCR三区, IF:1.393)

    36.Xinghui Li, Yuki Shimizu, Takeshi Ito, Yindi Cai, So Ito, Wei Gao, Measurement of six-degree-of-freedom planar motions by using a multi-probe surface encoder, Optical Engineering. 53(12):094002(2014). (SCI, JCR三区,IF:0.954)

    37.Qian Zhou, Xiaorui Qiao, Kai Ni, Xinghui Li*, and Xiaohao Wang, Depth detection in interactive projection system based on one-shot black-and-white stripe pattern, Optics Express. 25(5):5341-5351 (2017). (SCI, JCR一区,IF3.488) (通讯作者)

    38.Qian Zhou, Jinchao Pang, Xinghui Li,* Kai Ni, Rui Tian, Improving the spectral resolution of flat-field concave grating miniature spectrometers by dividing a wide spectral band into two narrow ones, Applied Optics. 54(32): 9450-9455 (2015).( SCI, JCR二区,IF1.784,通讯作者)

    39.Qian Zhou, Jinchao Pang, Xinghui Li*, Kai Ni, Rui Tian,Concave grating miniature spectrometer with an expanded spectral band by using two entrance slits, Chines Optics Letters. 13(11):110501 (2015). (SCI, JCR二区,IF1.851,通讯作者)

    40.Xinghui Li, Xiang Xiao, Kai Ni*, Qian Zhou, Huanhuan Wang, Xiaohao Wang, A precise reference position detection method for  linear encoders by using a coherence function algorithm, Proceedings of SPIE, 10023, 100231D(2016).

    41. 李星輝,清水裕樹,伊東聡,高偉2軸ロイドミラー干渉によるスケール格子の製作に関する研究,日本機械学会東北支部第49期総会講演会講演論文集, (2014).【In Japanese


    Publications (Patents)

    1.Xinghui Li, Kangning Yu, Qian Zhou, Guanhao Wu, Kai Ni, Xiaohao Wang, Measurement systems, methods and grating encoder, Chinese Invention Patent, ZL,202010817814.X, Issued Date/No. 2022.6.21, CN111964587B

    2.Gaopeng Xue, Xinghui Li, Xiaohao Wang, A low crosstalk planar two-dimensional Stage using a static electric comb driving, Chinese Invention Patent, ZL202110082495.7,Application date2021.1.21, Issued Date/No.2022.06.28,CN112901892B

    3.Xinghui Li, Yaping Shi, Qian Zhou, Kai Ni, Xiaohao Wang, A method and system of an reference position determination for an absolute grating encoder, Chinese Invention Patent, ZL, 201910654027.5Application date 2019.7.19Issued Date/No:2021.10.22,CN110440688B

    4.Xinghui Li, Xiang Xiao, Kai Ni, Qian Zhou, Weihan Yuan, Haiou Lu, Lijiang Zeng, Xiaohao Wang, A long-stroke grating interferometer and its distancing methodology,Chinese Invention Patent,  ZL201810764638.0Application Date, 20180712Issued Date: 2020-07-03

    5.Jiao Bai, Xinghui Li, Xiaohao Wang, Qian Zhou, Kai Ni, A short-range scanning strategy enabled chromatic confocal distancing method, components and platform, Chinese Invention Patent,, ZL2019102997417[P]. Issued date 2021-03-19.

    6.Xinghui Li, Jiao Bai, Xiaohao Wang, Qian Zhou, Kai Ni, A axial chromatic confocal distancing method, components and platform,  Chinese Invention Patent, ZL201910299737.0. Issued date 2021-03-05.

    7.Feng Feng, Xinghui Li, Wenmeng Zhou, Binbin Liu, Junlong Huang, Pingfa Feng, A rapid method for surface roughness measurement and dimensional relationship determination, Chinese Invention Patent, ZL201910569990.3Issued date 2019.6.27

    8.Xinghui LiKai NiHuanhuan WangQian Zhou, Xiaohao Wang, Xinyu Mao, Lijiang Zeng, Xiang XiaoA type of absolute Encoder, Japanese invention patentNo. 66416502018-552216, Issued date 2020.1.8.

    9.Xinghui Li, Xiang Xiao, Qian Zhou, Kai Ni, Peirong Wang, Xiaohao Wang, A distancing sensor based on spectrum coding, Chinese Invention Patent, ZL 201810791500.XIssued Date 2020.03.06

    10.Xinghui LiKai NiHuanhuan WangQian Zhou, Xinyu Mao, Lijiang Zeng, Xiang Xiao, Absolute Type Encoder,Scale grating and measurement Principle, 2018.4-2038.3, Chinese Invention Paten, ZL 2016 1 0157166.3.

    11.Xinghui LiKai NiHuanhuan WangQian Zhou, Xinyu Mao, Lijiang Zeng, Xiang XiaoA type of absolute Encoder, 2018.2-2038.1, Chinese Invention Paten, ZL 2016 1 0234556.6.

    12.Xinghui LiQian Zhou, Xiangwen Zhu, Kai NiHuanhuan WangHaifei Hu, Peng YanOne equipment for fabrication of arrayed one-axis grating, Chinese Invention Paten, 2018.8-2038.6ZL 2016 1 0839438.82018

    13.Xinghui LiKai NiXiangwen Zhu, Qian Zhou, Huanhuan WangHaifei Hu, Peng YanOne equipment for fabrication of one-axis holographic grating, Chinese Invention Paten, 2018.8-2038.6ZL 2016 1 0840386.6

    14.Xinghui LiJianxiong Li, Qian Zhou, Kai Ni, Huanhuan WangAn equipment for Beam alignment of laser displacement sensor with symmetrical arrangement, Chinese patent of utility, 2019.8-2029.7,CN209279896U

    15.Xinghui Li, Ruiming Chen, Kai Ni, Jiao Bai, Xiaohao Wang, Qian Zhou, An distance measurent system based on laser imaging, 2019.7-2029.6Chinese patent of utility, CN209147932U

    16.Xinghui Li,  Hao Wu, Xiaohao Wang, Qian Zhou, Kai Ni, A crystal cleaning device based on piezoelectric measurement2019.8-2029.7Chinese patent of utility,CN209272043U

    17.Xinghui Li, Hao WuA device for measuring settling mass of particles2019.8-2029.7Chinese patent of utility,CN209280512U

    18.Xinghui Li, Haiou Lu, Qian ZhouXiaohao Wang, Weihan Yuan, Kai Ni, Guanhao Wu, An attitude detection system of grating ruler splicing and grating ruler splicing system2019.4-2029.3Chinese patent of utility,CN208780130U

    19.Xinghui Li, Zhen Hua, Xiaohao Wang, Kai Ni, Lunchao Zhong, Qian Zhou, An on-line thickness measurement system for multilayer films2018.11-2028.10, Chinese patent of utility, ZL201820523594.8

    20.Xinghui Li, Kai Ni, Xiang Xiao ,Qian Zhou, Huanhuan Wang, Lijiang Zeng, WeihanYuan, Xiao Su, XiaohaoWang, A grating diffraction light deflection prism2017.8-2027.7Chinese patent of utility,ZL201621436678.5

    21.Xinghui Li, Qian Zhou ,Xiang Xiao, Kai Ni, Huanhuan Wang, Xinyu Mao, Lijiang Zeng, Xiao Su, Xiaohao Wang A device to judge the absolute position of reference point of grating ruler2018.8-2028.7Chinese patent of utility, CN207717036U

    22.Yuki ShimizuWei Gao, So Ito, Xinghui LiAn Integrated Exposure method by using a two-axis Lloyd’s mirror interferometerJapanese Invention PatentApplication NoP2012-250959No.P2014-099529

    23.Qian Zhou, Kai Ni, Xiang Xiao, Xinghui Li,Huanhuan Wang, Lijiang Zeng, Xiao Su, Weihan Yuan, Xiaohao Wang, A device for judging the reference position of grating ruler2018.8-2028.7Chinese patent of utility,CN207717034U

    24.Kai NiXinghui Li, Xiang Xiao, Qian Zhou, Huanhuan Wang, Lijiang Zeng, Weihan Yuan, Xiao Su.A multichannel grating ruler and measuring equipmentChinese patent of utility, 2017.7-2027.6ZL201621437176.4


    Invited Speech

    1.Holographic fabrication of two-dimensional scale gratings for surface encoder by using an orthogonal type two-axis Lloyd's mirror interference lithography, the 10th International Symposium on Precision Engineering Measurements and Instrumentation (ISPEMI 2018)Aug 8-10, 2018, Kunming, China

    2.Fabrication of scale gratings and application to surface encoders, NanoTrends 2018, Oct 20, 2018, Xi’an, China.

    3.Xinghui Li, Grating Interferometry for Precision Positioning, 21th Annal Conference of CSMNT, Oct 10-14, 2019, Wuhan, China

    4.Precision metrology technologies and High end instruments in NQI, 1st Symposium on Industrial Metrology for Nuclear Power RunningDec 9-10, 2020Shenzhen, China.

  • 毕业生ALUMNI
  • 招生及博士后招聘OPENING