Research

  • Nano-Fabrication and Integrated Device Platform

    The Nano-Fabrication and Integrated Device Platform is a shared research center built by TBSI under the vigorous planning and support of Shenzhen Municipal government, providing a complete set of micro- and nano-fabrication service and cooperation to universities, scientific research institutions and enterprises on campus and outside.






    The Nano-Fabrication and Integrated Device Platform has initially equipped a complete set of advanced micro nano processing and characterization equipment, which can provide an experimental platform for the development of research work such as graphics, deposition, etching, characterization, packaging and testing of micro nano devices. Including nearly 250 square meters of Class100 and Class1000 cleanroom.


         



  • Morphological characterization and etching

    FIB/SEM dual beam system FEI；





  • Graphics characterization and etching process


     

  • Packaging process



  • Etching process



  • Photolithography process




    Contact Tel: 0755-21678389

    Address: The -2nd floor of energy and environment building, SIGS.