The class hours will be assigned to lectures, invited talks, seminarsand flipped teaching activities. The topics of the lectures and the talks will include the development and the features of MEMS, current research hotspots inthe field of MEMS, typical MEMS products and their applications. R&D training will be provided through case studies. Students will present and discuss their ideas in the seminars. In the flipped teaching activities, student swill learn by themselves through making use of the abundant resource in Tsinghua, Berkeley and internet.
